Fig. 1. Schematic of two-dimensional light path for laser cleaning

Fig. 2. Angle distribution of the vibrating mirrors

Fig. 3. Filling maps of laser scanning with a fixed path

Fig. 4. Rotation angle distribution under the constraint of triangular wave function

Fig. 5. Random filling effects of the scanning path of laser cleaning.(a) N=25; (b) N=50; (c) N=100; (d) N=200; (e) N=400; (f) N=500

Fig. 6. Control sequence diagram of laser frequency variation with deflection angle of vibrating mirror

Fig. 7. Generating simulation diagram with random factor

Fig. 8. Comparison of surface cleaning effect under two laser cleaning modes. (a)--(c) Regular spiral cleaning; (d)--(e) random spiral cleaning

Fig. 9. Comparison of surface topography for two laser cleaning modes. (a₁)--(a₃) Regular spiral cleaning; (b₁)--(b₃) random spiral cleaning

Fig. 10. Comparison of defect depth in subsurface layer induced by laser thermal effect under two cleaning modes. (a) Regular spiral cleaning; (b) random spiral cleaning