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Journal of Synthetic Crystals, Volume. 50, Issue 5, 831(2021)

Growth Mechanism and Optical Properties of ZrN Films by Magnetron Sputtering

GAO Jie1,2, YAO Weizhen1, YANG Shaoyan1,2, WEI Jie3, LI Chengming1, and WEI Hongyuan1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    GAO Jie, YAO Weizhen, YANG Shaoyan, WEI Jie, LI Chengming, WEI Hongyuan. Growth Mechanism and Optical Properties of ZrN Films by Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2021, 50(5): 831

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    Received: Feb. 28, 2021

    Accepted: --

    Published Online: Aug. 23, 2021

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    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology