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Acta Optica Sinica, Volume. 20, Issue 4, 543(2000)

Phase Shifting Mask for 0.35 μm Contact Holes

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Phase Shifting Mask for 0.35 μm Contact Holes[J]. Acta Optica Sinica, 2000, 20(4): 543

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    Paper Information

    Category: Optical Devices

    Received: Oct. 19, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology