[1] [1] MISHRA M K, DUBEY V, MISHRA P M, et al. MEMS technology: a review. ［J］. J Engineer Res & Rep, 2019, 4(1): 1-24.

[4] [4] SILVONEN K J. A general approach to network analyzer calibration. ［J］. IEEE Trans Microwave Theo & Techniq, 1992, 40(4): 754-759.

[7] [7] HAMID S S, AIN M F, MOHD S K K, et al. Implementation of TRL (Thru-Reflect-Line) calibration kit for power amplifier measurement ［C］ // IEEE Int CACIS. Selangor, Malaysia. 2016: 147-150.

[9] [9] SERTEL K. Automated performance of on-wafer calibration and characterization using non-contact probes ［C］ // 92nd ARFTG Conf. Orlando, FL, USA. 2019: 1-4.

[14] [14] SAFWAT A M, HAYDEN L. Sensitivity analysis of calibration standards for SOLT and LRRM ［C］ // 58th ARFTG Conf. San Diego, CA, USA. 2001: 1-10.

[15] [15] LUO W, HU A, LIU K, et al. Study on SLT calibration method of 2-port waveguide DUT ［C］ // Int Conf Advan Elec Sci & Technol. Guangdong, China. 2016: 276-282.

[17] [17] HASLINA J Z JAAFAR H, BEH K S, et al. A comprehensive study on RF MEMS switch ［J］. Microsyst Technol, 2014, 20(12): 2109-2121.

[20] [20] LI M W, ZHANG Y F, ZHAO Y L, et al. Design and fabrication of a 4-bit RF MEMS attenuator with a high attenuation accuracy ［J］. Analog Integr Circ & Signal Process, 2020, 102(7): 1-8.

[21] [21] MAFINEJAD Y, KOUZANI A, MAFINEZHAD K, et al. Low insertion loss and high isolation capacitive RF MEMS switch with low pull-in voltage ［J］. Int J Advan Manufact Technol, 2017, 93(1): 661-670.

[22] [22] LI M W, LIU Q H, WU Q N, et al. Broadband radio frequency MEMS series contact switch with low insertion loss ［J］. Microsyst Technol, 2019. 25(5): 1619-1625.

[24] [24] BACA A G, OVERBERG M E, WOLFLEY S L, et al. A thin film TaN resistor reliability evaluation ［C］ // IEEE IRPS. Monterey, CA, USA. 2017: 31 -35.