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Microelectronics, Volume. 51, Issue 4, 494(2021)

Design of a Miniaturized RF MEMS Electronic Calibrator

WANG Shanshan1,2,3,4, WU Qiannan1,3,4,5, HAN Lulu1,2,3,4, FAN Lina1,3,4,6, and LI Mengwei1,2,3,4
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
  • 6[in Chinese]
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    WANG Shanshan, WU Qiannan, HAN Lulu, FAN Lina, LI Mengwei. Design of a Miniaturized RF MEMS Electronic Calibrator[J]. Microelectronics, 2021, 51(4): 494

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    Paper Information

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    Received: Sep. 27, 2020

    Accepted: --

    Published Online: Feb. 21, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200458

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology