Microelectronics, Volume. 51, Issue 4, 494(2021)
Design of a Miniaturized RF MEMS Electronic Calibrator
Based on the short-circuit-open-circuit-load-through(SOLT)calibration principle combined with MEMS switches, a miniaturized multifunctional electronic calibration module was designed. The simulation results showed that this electronic calibration kit required only 2 steps for dual-port calibration in the frequency band of 01~20 GHz. The insertion loss was less than 09 dB at direct circuit condition, the return loss was less than 048 dB at open circuit condition, the return loss was less than 039 dB at short circuit condition. The overall size was 25 mm×12 mm×08 mm. The MEMS electronic calibrator kit had the advantages of small size, low loss and cost, high calibration accuracy and efficiency. It was suitable for the applications of millimeter-wave measurement and miniaturized intelligent calibration.
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WANG Shanshan, WU Qiannan, HAN Lulu, FAN Lina, LI Mengwei. Design of a Miniaturized RF MEMS Electronic Calibrator[J]. Microelectronics, 2021, 51(4): 494
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Received: Sep. 27, 2020
Accepted: --
Published Online: Feb. 21, 2022
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