Microelectronics, Volume. 51, Issue 4, 494(2021)

Design of a Miniaturized RF MEMS Electronic Calibrator

WANG Shanshan1,2,3,4, WU Qiannan1,3,4,5, HAN Lulu1,2,3,4, FAN Lina1,3,4,6, and LI Mengwei1,2,3,4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
  • 6[in Chinese]
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    Based on the short-circuit-open-circuit-load-through(SOLT)calibration principle combined with MEMS switches, a miniaturized multifunctional electronic calibration module was designed. The simulation results showed that this electronic calibration kit required only 2 steps for dual-port calibration in the frequency band of 01~20 GHz. The insertion loss was less than 09 dB at direct circuit condition, the return loss was less than 048 dB at open circuit condition, the return loss was less than 039 dB at short circuit condition. The overall size was 25 mm×12 mm×08 mm. The MEMS electronic calibrator kit had the advantages of small size, low loss and cost, high calibration accuracy and efficiency. It was suitable for the applications of millimeter-wave measurement and miniaturized intelligent calibration.

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    WANG Shanshan, WU Qiannan, HAN Lulu, FAN Lina, LI Mengwei. Design of a Miniaturized RF MEMS Electronic Calibrator[J]. Microelectronics, 2021, 51(4): 494

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    Paper Information

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    Received: Sep. 27, 2020

    Accepted: --

    Published Online: Feb. 21, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200458

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