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Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 209(2025)

Simulation and Fabrication of High Figure of Merit S0 Lamb Wave SAW Resonators for the N77 Band

CAI Qiao, SHUAI Yao, PENG Bin, WU Chuangui, PAN Xinqiang, and ZHANG Wanli
Author Affiliations
  • State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
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    CAI Qiao, SHUAI Yao, PENG Bin, WU Chuangui, PAN Xinqiang, ZHANG Wanli. Simulation and Fabrication of High Figure of Merit S0 Lamb Wave SAW Resonators for the N77 Band[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 209

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    Paper Information

    Received: Dec. 20, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology