Chinese Journal of Lasers, Volume. 39, Issue 5, 502010(2012)

MOCVD Growth of AlGaInAs/AlGaAs Quantum Well for 852 nm Laser Diodes Studied by Reflectance Anisotropy Spectroscopy

Xu Huawei1,2、*, Ning Yongqiang1, Zeng Yugang1, Zhang Xing1, Zhang Jianwei1,2, Zhang Jian1,2, and Zhang Lisen1,2
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    References(9)

    [2] [2] Cui Jinjiang, Ning Yongqiang, Jiang Chenyu et al.. Beam quality of high power vertical-cavity bottom-emitting semiconductor lasers[J]. Chinese J. Lasers, 2011, 38(1): 0102002

    [3] [3] Wang Wei, Ning Yongqiang, Zhang Jinlong et al.. Polarization properties of high-power vertical-cavity bottom-emitting lasers[J]. Chinese J. Lasers, 2012, 39(3): 0302002

    [4] [4] Zhang Yan, Ning Yongqiang, Zhang Lisen et al.. Design and comparison of GaAs, GaAsP and InGaAlAs quantum-well active regions for 808-nm VCSELs[J]. Opt. Express, 2011, 19(13): 12569~12581

    [5] [5] M. Zorn, J. T. Zettler, A. Knaller et al.. In situ determination and control of AlGaInP composition during MOVPE growth[J]. Journal of Crystal Growth, 2006, 287(2): 637~641

    [6] [6] F. Bugge, M. Zorn, V. Zeimer et al.. MOVPE growth of InGaAs/GaAsP-MQWs for high power laser diodes studied by reflectance anisotropy spectroscopy[J]. Journal of Crystal Growth, 2009, 311(4): 1065~1069

    [7] [7] J. T. Zettler, K. Haberland, M Zorn et al.. Real-time monitoring of MOVPE device growth by reflectance anisotropy spectroscopy and related optical techniques[J]. Journal of Crystal Growth, 1998, 195(1-4): 151~162

    [8] [8] M. Zorn, M. Weyers. Comprehensive study of (Al)GaAs Si-doping using reflectance anisotropy spectroscopy in metal-organic vapour-phase epitaxy[J]. Journal of Physics D: Applied Physics, 2007, 40(3): 878~882

    [9] [9] K. Haberland, A. Bhattachary, M. Zorn et al.. MOVPE growth of (Al,Ga)InP-based laser structures monitored by real-time reflectance anisotropy spectroscopy[J]. Journal of Electronic Materials, 2000, 29(4): 468~472

    CLP Journals

    [1] XU Hua-wei, NING Yong-qiang, ZENG Yu-gang, ZHANG Xing, QIN Li. Design and epitaxial growth of quantum-well for 852 nm laser diode[J]. Optics and Precision Engineering, 2013, 21(3): 590

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    Xu Huawei, Ning Yongqiang, Zeng Yugang, Zhang Xing, Zhang Jianwei, Zhang Jian, Zhang Lisen. MOCVD Growth of AlGaInAs/AlGaAs Quantum Well for 852 nm Laser Diodes Studied by Reflectance Anisotropy Spectroscopy[J]. Chinese Journal of Lasers, 2012, 39(5): 502010

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    Paper Information

    Category: Laser physics

    Received: Dec. 29, 2011

    Accepted: --

    Published Online: Apr. 13, 2012

    The Author Email: Huawei Xu (xuhwciomp@163.com)

    DOI:10.3788/cjl201239.0502010

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