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Photonics Research, Volume. 7, Issue 4, 437(2019)

25 Gbps low-voltage hetero-structured silicon-germanium waveguide pin photodetectors for monolithic on-chip nanophotonic architectures

Daniel Benedikovic1、*, Léopold Virot2, Guy Aubin1, Farah Amar1, Bertrand Szelag2, Bayram Karakus2, Jean-Michel Hartmann2, Carlos Alonso-Ramos1, Xavier Le Roux1, Paul Crozat1, Eric Cassan1, Delphine Marris-Morini1, Charles Baudot3, Frédéric Boeuf3, Jean-Marc Fédéli2, Christophe Kopp2, and Laurent Vivien1
Author Affiliations
  • 1Centre de Nanosciences et de Nanotechnologies, CNRS, University of Paris-Sud, Université Paris-Saclay, C2N–Palaiseau, 91120 Palaiseau, France
  • 2University Grenoble Alpes and CEA, LETI, Minatec Campus, F-38054 Grenoble, Grenoble Cedex, France
  • 3Technology R&D, STMicroelectronics SAS, 850 rue Jean Monnet–38920 Crolles, France
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    [1] L. Vivien, L. Pavesi. Handbook of Silicon Photonics(2013).

    [2] M. Asghari, A. V. Krishnamoorthy. Energy-efficient communication. Nat. Photonics, 5, 268-270(2011).

    [3] D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, M. Nedeljkovic. Roadmap on silicon photonics. J. Opt., 18, 073003(2016).

    [4] K. Yamada, T. Tsuchizawa, H. Nishi, R. Kou, T. Hiraki, K. Takeda, H. Fukuda, Y. Ishikawa, K. Wada, T. Yamamoto. High-performance silicon photonics technology for telecommunications applications. Sci. Technol. Adv. Mater., 15, 024603(2014).

    [5] X. Chen, M. M. Milosevic, S. Stankovic, S. Reynolds, T. Dominguez-Bucio, K. Li, D. J. Thomson, F. Gardes, G. T. Reed. The emergence of silicon photonics as a flexible technology platform. Proc. IEEE, 106, 2101-2116(2018).

    [6] R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, J. G. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, P. Cheben. Subwavelength-grating metamaterial structures for silicon photonic devices. Proc. IEEE, 106, 2144-2157(2018).

    [7] J. Chilles, S. Fathpour. Silicon photonics beyond silicon-on-insulator. J. Opt., 19, 053001(2017).

    [8] D. Marris-Morini, V. Vakarin, J. M. Ramirez, Q. Liu, A. Ballabio, J. Frigerio, M. Montesinos, C. Alonso-Ramos, X. Le Roux, S. Serna, D. Benedikovic, D. Chrastina, L. Vivien, G. Isella. Germanium-based integrated photonics from near- to mid-infrared applications. Nanophotonics, 7, 1781-1793(2018).

    [9] Y. Li, Y. Zhang, L. Zhang, A. W. Poon. Silicon and optical receiver based on hybrid silicon photonic devices for intra-datacenter applications: state of the art and perspectives. Photon. Res., 3, B10-B27(2015).

    [10] A. V. Krishnamoorthy, D. A. B. Miller. Scaling optoelectronic-VLSI circuits into the 21st century: a technology roadmap. IEEE J. Sel. Top. Quantum Electron., 2, 55-76(1996).

    [11] G. Roelkens, L. Liu, D. Liang, R. Jones, A. Fang, B. Koch, J. Bowers. III-V/silicon photonics for on-chip and intra-chip optical interconnects. Laser Photon. Rev., 4, 751-779(2010).

    [12] O. Marshall, M. Hsu, Z. Wang, B. Kunert, C. Koos, D. Van Thourhout. Heterogeneous integration on silicon photonics. Proc. IEEE, 106, 2258-2269(2018).

    [13] T. Komljenovic, D. Huang, P. Pintus, M. A. Tran, M. L. Davenport, J. E. Bowers. Photonic integrated circuits using heterogeneous integration on silicon. Proc. IEEE, 106, 2246-2257(2018).

    [14] S. Fama, L. Colace, G. Masini, G. Assanto, H.-C. Luan. High performance germanium-on-silicon detectors for optical communications. Appl. Phys. Lett., 81, 586-588(2002).

    [15] S. J. Koester, J. D. Schaub, G. Delinger, J. O. Chu. Germanium-on-SOI infrared detectors for integrated photonic applications. IEEE J. Sel. Top. Quantum Electron., 12, 1489-1502(2006).

    [16] J. Michel, J. Liu, L. C. Kimerling. High-performance Ge-on-Si photodetectors. Nat. Photonics, 4, 527-534(2010).

    [17] L. Colace, G. Assanto. Germanium on silicon for near-infrared light sensing. IEEE Photon. J., 1, 69-79(2009).

    [18] T. Yin, R. Cohen, M. M. Morse, G. Sarid, Y. Chetrit, D. Rubin, M. J. Paniccia. 31 GHz Ge n-i-p waveguide photodetectors on silicon-on-insulator substrate. Opt. Express, 15, 13965-13971(2007).

    [19] L. Vivien, J. Osmond, J.-M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, S. Laval. 42  GHz p.i.n germanium photodetector integrated in a silicon-on-insulator waveguide. Opt. Express, 17, 6252-6257(2009).

    [20] D. Feng, S. Liao, P. Dong, N. Feng, N. Feng, H. Liang, D. Zheng, C. Kung, J. Fong, R. Shafilha, J. Cunningham, A. Krishnamoorthy, M. Asghari. High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide. Appl. Phys. Lett., 95, 261105(2009).

    [21] J. Joo, S. Kim, I. G. Kim, K.-S. Jang, G. Kim. High-sensitivity 10  Gbps Ge-on-Si photoreceiver operating at λ ∼ 1.55  μm. Opt. Express, 18, 16474-16479(2010).

    [22] S. Assefa, F. Xia, S. W. Bedell, Y. Zhang, T. Topuria, P. M. Rice, Y. A. Vlasov. CMOS-integrated high-speed MSM germanium waveguide photodetector. Opt. Express, 18, 4986-4999(2010).

    [23] S. Liao, N.-N. Feng, D. Feng, P. Dong, R. Shafilha, C.-C. Kung, H. Liang, W. Qian, Y. Liu, J. Fong, J. E. Cunningham, Y. Luo, M. Asghari. 36  GHz submicron silicon waveguide germanium photodetector. Opt. Express, 19, 10967-10972(2011).

    [24] C. T. DeRose, D. C. Trotter, W. A. Zortman, A. L. Starbuck, M. Fisher, M. R. Watts, P. S. Davids. Ultra compact 45  GHz CMOS compatible germanium waveguide photodiode with low dark current. Opt. Express, 19, 24897-24904(2011).

    [25] L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartman, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, J.-M. Fédéli. Zero-bias 40  Gbit/s germanium waveguide photodetector on silicon. Opt. Express, 20, 1096-1101(2012).

    [26] G. Li, Y. Luo, X. Zheng, G. Masini, A. Mekis, S. Sahni, H. Thacker, J. Yao, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy. Improving CMOS-compatible germanium photodetectors. Opt. Express, 20, 26345-26350(2012).

    [27] H. Pan, S. Assefa, W. M. J. Green, D. M. Kuchta, C. L. Schow, A. V. Rylyakov, B. G. Lee, C. W. Baks, S. M. Shank, Y. A. Vlasov. High-speed receiver based on waveguide germanium photodetector wire-bonded to 90  nm SOI CMOS amplifier. Opt. Express, 20, 18145-18155(2012).

    [28] L. Virot, L. Vivien, J.-M. Fédéli, Y. Bogumilowitz, J.-M. Hartmann, F. Boeuf, P. Crozat, D. Marris-Morini, E. Cassan. High-performance waveguide-integrated germanium PIN photodiodes for optical communication applications. Photon. Res., 1, 140-147(2013).

    [29] T.-Y. Liow, N. Duan, A. E.-J. Lim, X. Tu, M. Yu, G. Q. Lo. Waveguide Ge/Si avalanche photodetector with a unique low-height-profile device structure. Optical Fiber Communications Conference, M2G.6(2014).

    [30] Y. Zhang, S. Yang, Y. Yang, M. Gould, N. Ophir, A. E.-J. Lim, G.-Q. Lo, Y. P. Magill, K. Bergman, T. Baehr-Jones, M. Hochberg. A high-responsivity photodetector absent metal-germanium direct contact. Opt. Express, 22, 11367-11375(2014).

    [31] H. T. Chen, P. Verheyen, P. De Heyn, G. Lepage, J. De Coster, P. Absil, G. Roelkens, J. Van Campenhout. High-responsivity low-voltage 28-Gb/s Ge p-i-n photodetector with silicon contacts. J. Lightwave Technol., 33, 820-824(2015).

    [32] H. Chen, P. Verheyen, P. De Heyn, G. Lepage, J. De Coster, S. Balakrishnan, P. Absil, W. Yao, L. Shen, G. Roelkens, J. Van Campenhout. −1  V 67  GHz bandwidth Si-contacted germanium waveguide p-i-n photodetector for optical links at 56  Gbps and beyond. Opt. Express, 24, 4622-4631(2016).

    [33] H. Chen, P. Verheyen, P. De Heyn, G. Lepage, J. De Coster, S. Balakrishnan, P. Absil, G. Roelkens, J. Van Campenhout. Dark current analysis in high-speed germanium p-i-n waveguide photodetectors. J. Appl. Phys., 119, 213105(2016).

    [34] L. Virot, D. Benedikovic, B. Szelag, C. Alonso-Ramos, B. Karakus, J.-M. Hartmann, X. Le Roux, P. Crozat, E. Cassan, D. Marris-Morini, Ch. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, L. Vivien. Integrated waveguide PIN photodiodes exploiting lateral Si/Ge/Si heterojunction. Opt. Express, 25, 19487-19496(2017).

    [35] T. A. Langdo, C. W. Leitz, M. T. Currie, E. A. Fitzgerald, A. Lochtefeld, D. A. Antoniadis. High quality Ge on Si by epitaxial necking. Appl. Phys. Lett., 76, 3700-3702(2000).

    [36] J. M. Baribeau, T. E. Jackman, D. C. Houghton, P. Maigné, M. W. Denhoff. Growth and characterization of Si1-xGex and Ge epilayers on (100) Si. J. Appl. Phys., 63, 5738-5746(1988).

    [37] H.-C. Luan, D. R. Lim, K. K. Lee, K. M. Chen, J. G. Sandland, K. Wada, L. C. Kimerling. High-quality Ge epilayers on Si with low threading-dislocation densities. Appl. Phys. Lett., 75, 2909-2911(1999).

    [38] C. G. Littlejohns, M. Nedeljkovic, C. F. Mallinson, J. F. Watts, G. Z. Mashanovich, G. T. Reed, F. Y. Gardes. Next generation device grade silicon-germanium on insulator. Sci. Rep., 5, 8288(2015).

    [39] C. G. Littlejohns, T. Dominguez Bucio, M. Nedeljkovic, H. Wang, G. Z. Mashanovich, G. T. Reed, F. Y. Gardes. Towards a fully functional integrated photonic-electronic platform via a single SiGe growth step. Sci. Rep., 6, 19425(2016).

    [40] J.-M. Hartmann, J.-F. Damlencourt, Y. Bogumilowicz, P. Holliger, G. Roland, T. Billon. Reduced pressure-chemical vapor deposition of intrinsic and doped Ge layers on Si(001) for microelectronics and optoelectronics purposes. J. Cryst. Growth, 274, 90-99(2005).

    [41] Y. H. Tan, C. S. Tan. Growth and characterization of germanium epitaxial film on silicon (001) using reduced pressure chemical vapor deposition. Thin Solid Films, 520, 2711-2716(2012).

    [42] J. Liu, X. Sun, R. Camacho-Aguilera, L. C. Kimerling, J. Michel. Ge-on-Si laser operating at room temperature. Opt. Lett., 35, 679-681(2010).

    [43] R. E. Camacho-Aguillera, Y. Cai, N. Patel, J. T. Bessette, M. Romagnoli, L. C. Kimerling, J. Michel. An electrically pumped germanium laser. Opt. Express, 20, 11316-11320(2012).

    [44] G. T. Reed, G. Mashanovich, F. Y. Gardes, D. J. Thomson. Silicon optical modulators. Nat. Photonics, 4, 518-526(2010).

    [45] D. Marris-Morini, L. Virot, C. Baudot, J.-M. Fédéli, G. Rasigade, D. Pérez-Galacho, J.-M. Hartmann, S. Oliver, P. Brindel, P. Crozat, F. Boeuf, L. Vivien. A 40 Gbit/s optical link on a 300-mm silicon platform. Opt. Express, 22, 6674-6679(2014).

    [46] A. H. Atabaki, S. Moazeni, F. Pavanello, H. Gevorgyan, J. Notaros, L. Alloatti, M. T. Wade, C. Sun, S. A. Kruger, H. Meng, K. Al Qubaisi, I. Wang, B. Zhang, A. Khilo, C. V. Baiocco, M. A. Popović, V. M. Stojanović, R. J. Ram. Integrating photonics with silicon nanoelectronics for the next generation of systems on a chip. Nature, 556, 349-354(2018).

    [47] Lumerical, Inc.

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    Daniel Benedikovic, Léopold Virot, Guy Aubin, Farah Amar, Bertrand Szelag, Bayram Karakus, Jean-Michel Hartmann, Carlos Alonso-Ramos, Xavier Le Roux, Paul Crozat, Eric Cassan, Delphine Marris-Morini, Charles Baudot, Frédéric Boeuf, Jean-Marc Fédéli, Christophe Kopp, Laurent Vivien, "25 Gbps low-voltage hetero-structured silicon-germanium waveguide pin photodetectors for monolithic on-chip nanophotonic architectures," Photonics Res. 7, 437 (2019)

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    Paper Information

    Category: Silicon Photonics

    Received: Nov. 30, 2018

    Accepted: Jan. 24, 2019

    Published Online: Apr. 11, 2019

    The Author Email: Daniel Benedikovic (daniel.benedikovic@c2n.upsaclay.fr)

    DOI:10.1364/PRJ.7.000437

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology