Journal of Infrared and Millimeter Waves, Volume. 41, Issue 3, 534(2022)
Research on p-on-n LWIR and VLWIR HgCdTe infrared focal plane detectors technology
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Fig. 2. Set 1~Set 3 focal plane device responsivity (top) and blind pixel distribution map (bottom)
Fig. 3. The noise signal distribution diagram of Set 1~Set 3 (Set 1~Set 3 from left to right)
Fig. 4. NETD histogram of focal plane devices in Set 1~Set 3 and Infrared image(Set 3)
Fig. 5. The relationship between R0A product and wavelength under different processes
Table 1. ROIC parameters
View tableView in ArticleTable 1. ROIC parameters
参数 读出电路 工艺 CMOS 0.35 μm 面阵尺寸 640×512 像元间距 25 μm 输入极性 p-on-n 电容/电荷存储能力 4.17 pC/26 Me- 读出模式 快摄模式、ITR 帧频 ≤200 Hz 动态范围 3.2 V
Table 2. focal plane device parameters and test parameter settings
View tableView in ArticleTable 2. focal plane device parameters and test parameter settings
参数 器件 Set 1 Set 2 Set 3 截止波长 9.5 μm 10.1 μm 14.97 μm 工作温度 77 K 77 K 71 K 视场角（FOV） F2 F2 F2 电容值 4.17 pC 4.17 pC 4.17 pC
Table 3. Test results of three focal plane devices with different wavelengths
View tableView in ArticleTable 3. Test results of three focal plane devices with different wavelengths
参数 器件 Set 1 Set 2 Set 3 有效像元率 99.90% 99.78% 99.82% 峰值探测率 2.10e+11
（cm.Hz1/2）/w
1.61e+11
（cm.Hz1/2）/w
1.20e+11
（cm.Hz1/2）/w
Table 4. Test results of three focal plane devices with different wavelengths
View tableView in ArticleTable 4. Test results of three focal plane devices with different wavelengths
参数 器件 Set 1 Set 2 Set 3 截止波长 9.5 μm 10.1 μm 14.97 μm 暗电流 40.28 pA 58.8 pA 26.21 nA NETD 15.2 mK 18.2 mK 20.2 mK 噪声 0.506 mV 0.527 mV 0.408 mV 有效像元率 99.90% 99.78% 99.82% R0A 1030.48（Ω·cm2） 705.92（Ω·cm2） 1.46（Ω·cm2）
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Li-Hua LI, Bo-Jun XIONG, Chao-Wei YANG, Xiong-Jun LI, Zhi-Yuan WAN, Peng ZHAO, Xiang-Yun LIU. Research on p-on-n LWIR and VLWIR HgCdTe infrared focal plane detectors technology[J]. Journal of Infrared and Millimeter Waves, 2022, 41(3): 534
Paper Information
Category: Research Articles
Received: Aug. 25, 2021
Accepted: --
Published Online: Jul. 8, 2022
The Author Email: Li-Hua LI (llh_email@163.com)
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