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Acta Optica Sinica, Volume. 30, Issue 6, 1667(2010)

A New Optical Proximity Correction with Mapping Model between Segments and Control Sites

Yang Yiwei* and Shi Zheng
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    Yang Yiwei, Shi Zheng. A New Optical Proximity Correction with Mapping Model between Segments and Control Sites[J]. Acta Optica Sinica, 2010, 30(6): 1667

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 25, 2009

    Accepted: --

    Published Online: Jun. 7, 2010

    The Author Email: Yiwei Yang (yangyw@vlsi.zju.edu.cn)

    DOI:10.3788/aos20103006.1667

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology