Fig. 1. Experimental setup of APPP system

Fig. 2. APPP process

Fig. 3. APPP removal function

Fig. 4. Experimental diagram of several group of removal functions

Fig. 5. MRR versus processing speed

Fig. 6. Real map of element surface temperature during processing

Fig. 7. Experimental diagrams of influence of sediment on subsequent processing. (a) Gradually increasing sediment on element surface; (b) experimental path of removal function

Fig. 8. Experimental results for influence of sediment on subsequent processing

Fig. 9. Fitting curve of variable removal function. (a) A; (b) C

Fig. 10. Influences of experimental variables on removal function. (a) Flow rate of He; (b) flow rate of CF₄; (c) flow rate of O₂; (d) power

Fig. 11. Comparison of single removal function before and after processing

Fig. 12. Comparison of variable removal function before and after processing

Fig. 13. PSD results before and after processing