Variable Removal Function in Atmospheric Pressure Plasma Polishing

Bing Peng; Aihuan Dun; Lunzhe Wu; Zhe Wang; Xueke Xu

doi:10.3788/CJL202148.2403002

Chinese Journal of Lasers, Volume. 48, Issue 24, 2403002(2021)

Variable Removal Function in Atmospheric Pressure Plasma Polishing

Bing Peng^1,2, Aihuan Dun¹, Lunzhe Wu¹, Zhe Wang^1,2, and Xueke Xu^1、*

¹Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²College of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Bing Peng, Aihuan Dun, Lunzhe Wu, Zhe Wang, Xueke Xu. Variable Removal Function in Atmospheric Pressure Plasma Polishing[J]. Chinese Journal of Lasers, 2021, 48(24): 2403002

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Paper Information

Category: materials and thin films

Received: Mar. 22, 2021

Accepted: May. 17, 2021

Published Online: Nov. 16, 2021

The Author Email: Xu Xueke (xuxk@siom.ac.cn)

DOI:10.3788/CJL202148.2403002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology