Chinese Journal of Lasers, Volume. 43, Issue 5, 508005(2016)
Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer
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Lu Yuxian, Qi Xiangdong, Yu Haili, Li Xiaotian, Zhang Shanwen, Jiang Shan, Yin Lu. Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer[J]. Chinese Journal of Lasers, 2016, 43(5): 508005
Category: measurement and metrology
Received: Oct. 21, 2015
Accepted: --
Published Online: May. 4, 2016
The Author Email: Yuxian Lu (hongyulu0412@hotmail.com)