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Chinese Journal of Lasers, Volume. 43, Issue 5, 508005(2016)

Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer

Lu Yuxian1,2、*, Qi Xiangdong1, Yu Haili1, Li Xiaotian1, Zhang Shanwen1, Jiang Shan1, and Yin Lu1,2
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    Lu Yuxian, Qi Xiangdong, Yu Haili, Li Xiaotian, Zhang Shanwen, Jiang Shan, Yin Lu. Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer[J]. Chinese Journal of Lasers, 2016, 43(5): 508005

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    Paper Information

    Category: measurement and metrology

    Received: Oct. 21, 2015

    Accepted: --

    Published Online: May. 4, 2016

    The Author Email: Yuxian Lu (hongyulu0412@hotmail.com)

    DOI:10.3788/cjl201643.0508005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology