Chinese Journal of Lasers, Volume. 49, Issue 18, 1804002(2022)

Design and Performance Evaluation of Chromatic Confocal Displacement Sensor with High Measuring Range

Tanbin Shao, Wenping Guo*, Yinghao Xi, Ziyu Liu, Kecheng Yang, and Min Xia
Author Affiliations
  • School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
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    CLP Journals

    [1] WANG Yulong, LI Jie, HOU Xi, CAO Xuedong, CHEN Lin, YANG Wenbo. Review of Chromatic Confocal Displacement Measurement Techniques Based on Diffractive Dispersion[J]. Semiconductor Optoelectronics, 2023, 44(1): 1

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    Tanbin Shao, Wenping Guo, Yinghao Xi, Ziyu Liu, Kecheng Yang, Min Xia. Design and Performance Evaluation of Chromatic Confocal Displacement Sensor with High Measuring Range[J]. Chinese Journal of Lasers, 2022, 49(18): 1804002

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    Paper Information

    Category: Measurement and metrology

    Received: Nov. 19, 2021

    Accepted: Jan. 28, 2022

    Published Online: Jul. 28, 2022

    The Author Email: Guo Wenping (wpguo@hust.edu.cn)

    DOI:10.3788/CJL202249.1804002

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