Fig. 1. Schematic of chromatic confocal displacement measurement system

Fig. 2. Normalized setting of spectral characteristics. (a) Collection path of output light from fiber; (b) measurement path of modulation function; (c) collection path of background light; (d) collection path of signal light

Fig. 3. Structural diagram of optimized objective lens

Fig. 4. Spot diagrams at different wavelengths. (a) 500 nm; (b) 600 nm; (c) 700 nm

Fig. 5. Spherical aberration curves at different wavelengths. (a) 500 nm; (b) 600 nm; (c) 700 nm

Fig. 6. Focal shift versus wavelength

Fig. 7. Physical drawing of experimental device

Fig. 8. Normalized spectra for mirrors at different positions during actual measurement

Fig. 9. Peak wavelength versus position

Fig. 10. Standard deviation and mean absolute deviation of measurement results

Fig. 11. Actually measured spectral peak fluctuation

Fig. 12. Different material test samples. (a) Metal; (b) ceramic; (c) SiO₂ polished surface

Fig. 13. Measured spectra of different material samples. (a) Metal; (b) ceramic; (c) SiO₂ polished surface

Fig. 14. Position measurement deviations of different material samples. (a) Metal; (b) ceramic; (c) SiO₂ polished surface