[1] [1] WHITESIDES G M. The origins and the future of microfluidics[J]. Nature, 2006, 442(7101): 368-373.

[2] [2] YAGER P, EDWARDS T, FU E, et al. Microfluidic diagnostic technologies for global public health[J]. Nature, 2006, 442(7101): 412-418.

[3] [3] SACKMANN E K, FULTON A L, BEEBE D J. The present and future role of microfluidics in biomedical research[J]. Nature, 2014, 507(7491): 181-189.

[4] [4] MEHDIPOOR M, BADRI GHAVIFEKR H. Design and analysis of a new MEMS biosensor based on coupled mechanical resonators for microfluidics applications[J]. Analog Integrated Circuits and Signal Processing, 2022, 111(2): 277-286.

[5] [5] WANG H B, TONG H, LIU C, et al. Innovative two-step method for efficient silicon microfluidic device fabrication: Integrating laser ablation with wet etching[J]. Materials Science in Semiconductor Processing, 2024, 174: 108208.

[6] [6] CHEN X L, FAN G C, LIN C H, et al. Investigation on the electrochemical machining of micro groove using masked porous cathode[J]. Journal of Materials Processing Technology, 2020, 276: 116406.

[7] [7] GOLDENBERG B G, LEMZYAKOV A G, NAZMOV V P, et al. Multifunctional X-ray lithography station at VEPP-3[J]. Physics Procedia, 2016, 84: 205-212.

[8] [8] PENG Y, CUI L C, GAO J, et al. Fabrication of high-performance microfluidic SERS substrates by metal-assisted chemical etching of silicon scratches[J]. Surface Topography: Metrology and Properties, 2022, 10 (3), 035008.

[9] [9] FAN X, RONG Y, ZHANG G, et al. High-profile-quality microchannels fabricated by UV picosecond laser for microfluidic mixing[J]. Optics & Laser Technology, 2024, 170: 110314.

[10] [10] WANG YY, ZHAO Z X, ZHONG J, et al. Hierarchically micro/nanostructured current collectors induced by ultrafast femtosecond laser strategy for high-performance lithium-ion batteries[J]. ENERGY & ENVIRONMENTAL MATERIALS, 2022, 5(3): 969-976.

[11] [11] ZHANG N X, ZHENG Y J, TRIFONOVA A, et al. Laser structured Cu foil for high-performance lithium-ion battery anodes[J]. Journal of Applied Electrochemistry, 2017, 47(7): 829-837.

[12] [12] MOUSKEFTARAS A, BEURTHEY S, COGAN J, et al. Short-pulse laser-assisted fabrication of a Si-SiO2 microcooling device[J]. Micromachines, 2021, 12(9): 1054.