Research on the UV Laser Etching with Ultrashort Pulse Laser on the Surface of Silicon Materials

Chen Haipeng; Wang Hao; Ouyang Wentai

doi:10.14128/j.cnki.al.20244404.015

APPLIED LASER, Volume. 44, Issue 4, 15(2024)

Research on the UV Laser Etching with Ultrashort Pulse Laser on the Surface of Silicon Materials

Chen Haipeng¹, Wang Hao^1,2、*, and Ouyang Wentai³

Author Affiliations

¹Shanghai Institute of Laser Technology Co., Ltd, Shanghai 200233, China

²Shanghai Engineering Research Center of Laser Intelligent Manufacturing, Shanghai 200233, China

³Ningbo Institute of Materials Technology & Engineering, CAS, Ningbo 315201, Zhejiang, China

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Chen Haipeng, Wang Hao, Ouyang Wentai. Research on the UV Laser Etching with Ultrashort Pulse Laser on the Surface of Silicon Materials[J]. APPLIED LASER, 2024, 44(4): 15

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Paper Information

Category:

Received: Apr. 3, 2024

Accepted: Dec. 13, 2024

Published Online: Dec. 13, 2024

The Author Email: Hao Wang (siltwanghao@163.com)

DOI:10.14128/j.cnki.al.20244404.015

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology