Chinese Journal of Lasers, Volume. 49, Issue 17, 1704001(2022)

Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb

Bing Han1, Ginman Ge1,2、*, Xinyi Ren1,3, Xiaojun Li2, jia Liu2, Ming Yan1、**, and Heping Zeng1,3
Author Affiliations
  • 1State Key Laboratory of Precision Spectroscopy Science and Technology, East China Normal University, Shanghai 200062, China
  • 2National Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology, Xi’an 710100, Shaanxi, China
  • 3Chongqing Institute, East China Normal University, Chongqing 401147, China
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    Figures & Tables(8)
    Double-comb surface shape measuring system. (a) Experimental setup; (b) output spectrum of electro-optical comb
    Time domain characteristics of dual-comb. (a) Time domain dual-comb interferometric sequence; (b) partial enlargement
    Single-cycle dual-comb interferogram
    Test of system stability. (a) Allen deviation; (b) deviation
    Dual-comb measurement result under galvanometer scanning
    Measured signal and reference signal reflected by surface of sample 1
    Surface morphologies of sample 1. (a) 3D topography of antenna sample 1 with physical picture shown in inset; (b) result of surface fitting
    Surface morphologies of sample 2. (a) 3D topography of antenna sample 2 with physical picture shown in inset; (b) result of surface fitting
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    Bing Han, Ginman Ge, Xinyi Ren, Xiaojun Li, jia Liu, Ming Yan, Heping Zeng. Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb[J]. Chinese Journal of Lasers, 2022, 49(17): 1704001

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    Paper Information

    Category: Measurement and metrology

    Received: Nov. 8, 2021

    Accepted: Dec. 27, 2021

    Published Online: Jul. 28, 2022

    The Author Email: Ge Ginman (gjm129@163.com), Yan Ming (myan@lps.ecnu.edu.cn)

    DOI:10.3788/CJL202249.1704001

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