Chinese Journal of Lasers, Volume. 49, Issue 17, 1704001(2022)
Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb
Fig. 1. Double-comb surface shape measuring system. (a) Experimental setup; (b) output spectrum of electro-optical comb
Fig. 2. Time domain characteristics of dual-comb. (a) Time domain dual-comb interferometric sequence; (b) partial enlargement
Fig. 7. Surface morphologies of sample 1. (a) 3D topography of antenna sample 1 with physical picture shown in inset; (b) result of surface fitting
Fig. 8. Surface morphologies of sample 2. (a) 3D topography of antenna sample 2 with physical picture shown in inset; (b) result of surface fitting
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Bing Han, Ginman Ge, Xinyi Ren, Xiaojun Li, jia Liu, Ming Yan, Heping Zeng. Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb[J]. Chinese Journal of Lasers, 2022, 49(17): 1704001
Category: Measurement and metrology
Received: Nov. 8, 2021
Accepted: Dec. 27, 2021
Published Online: Jul. 28, 2022
The Author Email: Ge Ginman (gjm129@163.com), Yan Ming (myan@lps.ecnu.edu.cn)