Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb

Bing Han; Ginman Ge; Xinyi Ren; Xiaojun Li; jia Liu; Ming Yan; Heping Zeng

doi:10.3788/CJL202249.1704001

Chinese Journal of Lasers, Volume. 49, Issue 17, 1704001(2022)

Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb

Bing Han¹, Ginman Ge^1,2、*, Xinyi Ren^1,3, Xiaojun Li², jia Liu², Ming Yan^1、**, and Heping Zeng^1,3

¹State Key Laboratory of Precision Spectroscopy Science and Technology, East China Normal University, Shanghai 200062, China

²National Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology, Xi’an 710100, Shaanxi, China

³Chongqing Institute, East China Normal University, Chongqing 401147, China

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Bing Han, Ginman Ge, Xinyi Ren, Xiaojun Li, jia Liu, Ming Yan, Heping Zeng. Research on Surface Shape Measurement Technology of Terahertz Devices Based on Optical Frequency Comb[J]. Chinese Journal of Lasers, 2022, 49(17): 1704001

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Paper Information

Category: Measurement and metrology

Received: Nov. 8, 2021

Accepted: Dec. 27, 2021

Published Online: Jul. 28, 2022

The Author Email: Ge Ginman (gjm129@163.com), Yan Ming (myan@lps.ecnu.edu.cn)

DOI:10.3788/CJL202249.1704001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology