Research on Calibration Method of Electrode Gap of Capacitive MEMS Gyroscope

[1] [1] SYED A R B,MUHAMMAD M S,AMIR H,et al.A novel design of high resolution MEMS gyroscope using mode-localization in weakly coupled resonators［J］.IEEE Access,2021,9:157597-157608.

[2] [2] WANG Yuchen,CAO Rui,LI Chong,et al.Concepts,roadmaps and challenges of ovenized MEMS gyroscopes:A review［J］.IEEE Sensors Journal,2016,23:555-561.

[5] [5] ZAKRIYA M,GHADA D,AVEEK C,et al.An optimization technique for performance improvement of gap-changeable MEMS accelerometers［J］.Mechatronics,2018,54:203-216.

[6] [6] WANG Peng,LI Qingsong,XU Yi,et al.Calibration of coupling errors for scale factor nonlinearity improvement in navigation-grade honeycomb disk resonator gyroscope［J］.IEEE Transactions on Industrial Electronics,2023,70(5):5347-5355.

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LIU Gao, HOU Zhanqiang, KUANG Yunbin, XIAO Dingbang, WU Xuezhong. Research on Calibration Method of Electrode Gap of Capacitive MEMS Gyroscope[J]. Piezoelectrics & Acoustooptics, 2023, 45(4): 499

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Paper Information

Special Issue:

Received: Feb. 27, 2023

Accepted: --

Published Online: May. 9, 2024

The Author Email:

DOI:10.11977/j.issn.1004-2474.2023.04.003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology