Piezoelectrics & Acoustooptics, Volume. 45, Issue 4, 499(2023)
Research on Calibration Method of Electrode Gap of Capacitive MEMS Gyroscope
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LIU Gao, HOU Zhanqiang, KUANG Yunbin, XIAO Dingbang, WU Xuezhong. Research on Calibration Method of Electrode Gap of Capacitive MEMS Gyroscope[J]. Piezoelectrics & Acoustooptics, 2023, 45(4): 499
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Received: Feb. 27, 2023
Accepted: --
Published Online: May. 9, 2024
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