[1] Li J, Gou H, Zhang G R et al. Analysis and research of PCB linewidth in production process[J]. Science and Technology & Innovation, 162-163, 167(2022).

[2] Attota R, Silver R, Dixson R. Linewidth measurement technique using through-focus optical images[J]. Applied Optics, 47, 495-503(2008).

[3] Holm E A, Cohn R, Gao N et al. Overview: computer vision and machine learning for microstructural characterization and analysis[J]. Metallurgical and Materials Transactions A, 51, 5985-5999(2020).

[4] Ma J Q, Gao Z S, Yuan Q et al. Microscopy measurement method of microstructure linewidth based on translation difference[J]. Acta Photonica Sinica, 52, 0212001(2023).

[5] Zhang C, Yuan Q, Zhang J L et al. Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy[J]. Infrared and Laser Engineering, 51, 20220050(2022).

[6] de Groot P. Principles of interference microscopy for the measurement of surface topography[J]. Advances in Optics and Photonics, 7, 1-65(2015).

[7] Su R, Liu J Y, Qiao X Y et al. Advances in scanning white light interferometry for surface topography measurement[J]. Laser & Optoelectronics Progress, 60, 0312005(2023).

[8] Harasaki A, Wyant J C. Fringe modulation skewing effect in white-light vertical scanning interferometry[J]. Applied Optics, 39, 2101-2106(2000).

[9] Vo Q, Fang F Z, Zhang X D et al. Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms[J]. Applied Optics, 56, 8174-8185(2017).

[10] de Groot P, Colonna de Lega X, Kramer J et al. Determination of fringe order in white-light interference microscopy[J]. Applied Optics, 41, 4571-4578(2002).

[11] Sang M, Du X Y, Wang S et al. Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy[J]. Optics Express, 28, 15101-15111(2020).

[12] Xie W C. Transfer characteristics of white light interferometers and confocal microscopes[D](2017).

[13] Sun Y F, Gao Z S, Ma J Q et al. Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometry[J]. Optics and Lasers in Engineering, 152, 106949(2022).

[15] Xie W C, Hagemeier S, Woidt C et al. Influences of edges and steep slopes in 3D interference and confocal microscopy[J]. Proceedings of SPIE, 9890, 98900X(2016).