Acta Optica Sinica, Volume. 44, Issue 13, 1312003(2024)
Harnessing Batwing High-Frequency Pulse Traits for Super-Resolution Measurement of Microstructure Linewidth
Article index updated: Sep. 6, 2025
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Zhiyi Xu, Xiaoxin Fan, Jiale Zhang, Shenghang Zhou, Zhenyan Guo, Dan Zhu, Zhishan Gao, Qun Yuan. Harnessing Batwing High-Frequency Pulse Traits for Super-Resolution Measurement of Microstructure Linewidth[J]. Acta Optica Sinica, 2024, 44(13): 1312003
Category: Instrumentation, Measurement and Metrology
Received: Feb. 6, 2024
Accepted: Apr. 11, 2024
Published Online: Jul. 8, 2024
The Author Email: Qun Yuan (yuanqun@njust.edu.cn)
CSTR:32393.14.AOS240623