Acta Optica Sinica, Volume. 44, Issue 13, 1312003(2024)

Harnessing Batwing High-Frequency Pulse Traits for Super-Resolution Measurement of Microstructure Linewidth

Zhiyi Xu, Xiaoxin Fan, Jiale Zhang, Shenghang Zhou, Zhenyan Guo, Dan Zhu, Zhishan Gao, and Qun Yuan*
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing 210094, Jiangsu, China
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    Article index updated: Sep. 6, 2025

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    Zhiyi Xu, Xiaoxin Fan, Jiale Zhang, Shenghang Zhou, Zhenyan Guo, Dan Zhu, Zhishan Gao, Qun Yuan. Harnessing Batwing High-Frequency Pulse Traits for Super-Resolution Measurement of Microstructure Linewidth[J]. Acta Optica Sinica, 2024, 44(13): 1312003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 6, 2024

    Accepted: Apr. 11, 2024

    Published Online: Jul. 8, 2024

    The Author Email: Qun Yuan (yuanqun@njust.edu.cn)

    DOI:10.3788/AOS240623

    CSTR:32393.14.AOS240623

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