Harnessing Batwing High-Frequency Pulse Traits for Super-Resolution Measurement of Microstructure Linewidth

Zhiyi Xu; Xiaoxin Fan; Jiale Zhang; Shenghang Zhou; Zhenyan Guo; Dan Zhu; Zhishan Gao; Qun Yuan

doi:10.3788/AOS240623

Acta Optica Sinica, Volume. 44, Issue 13, 1312003(2024)

Harnessing Batwing High-Frequency Pulse Traits for Super-Resolution Measurement of Microstructure Linewidth

Zhiyi Xu, Xiaoxin Fan, Jiale Zhang, Shenghang Zhou, Zhenyan Guo, Dan Zhu, Zhishan Gao, and Qun Yuan^*

School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing 210094, Jiangsu, China

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Zhiyi Xu, Xiaoxin Fan, Jiale Zhang, Shenghang Zhou, Zhenyan Guo, Dan Zhu, Zhishan Gao, Qun Yuan. Harnessing Batwing High-Frequency Pulse Traits for Super-Resolution Measurement of Microstructure Linewidth[J]. Acta Optica Sinica, 2024, 44(13): 1312003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Feb. 6, 2024

Accepted: Apr. 11, 2024

Published Online: Jul. 8, 2024

The Author Email: Qun Yuan (yuanqun@njust.edu.cn)

DOI:10.3788/AOS240623

CSTR:32393.14.AOS240623

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology