[1] [1] Liang Haoming, Zhuang Kui, Zhang Qingying, et al.. The diffraction grating ruling engines[J]. Acta Optica Sinica, 1981, 1(1): 51-58.

[2] [2] George R Harrison, Stephen W Thompson, Harry Kazukonis et al.. 750-mm ruling engine producing large gratings and echelles[J]. J Opt Soc Am, 1972, 62(6): 751-756.

[3] [3] George R Harrison, Neville Sturgis, Sumner P Davis, et al.. Interferometrically controlled ruling of ten-iInch diffraction gratings[J]. J Opt Soc Am, 1959, 49(3): 205-208.

[4] [4] George R Harrison, Stephen W Thompson. Large diffraction gratings ruled on a commercial measuring machine controlledinterferometrically[J]. J Opt Soc Am, 1970, 60(5): 591-595.

[5] [5] G W Stroke. Attainment of high-resolution gratings by ruling under interferometric control[J]. J Opt Soc Am, 1961, 51(10): 1321-1339.

[6] [6] Toshiaki Kita, Tatsuo Harada. Ruling engine using a piezoelectric device for large and high-groove density gratings[J]. Appl Opt, 1992, 31(8): 1399-1406.

[7] [7] George R Harrison. Techniques for ruling improved large diffraction gratings[C]. Massachusetts Institute of Technology, 1971. 1-14.

[8] [8] Yu Haili. Research on Large Stroke Nan-Positioning Technology and Application Based on Dual-Frequency Laser Interferometer[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2011.

[9] [9] Li Xiaotian, Bayanheshig, Qi Xiangdong, et al.. Influence and revising method of machine-ruling grating line′s curve error, location error on plane grating′s performance[J]. Chinese J Lasers, 2013, 40(3): 0308009.

[10] [10] Liu Bo, Guo Jianying, Sun Yongquan. Modeling and control for PZT micro-displacement actuator[J]. Optics and Precision Engineering, 2013, 21(6): 1503-1509.

[11] [11] Zhong Jun. Research on Some Key Technologies of the Macroscopic Scale and Nano Positioning[D]. Hefei: University of Science and Technology of China, 2011.

[12] [12] Zhang Dong, Zhang Chengjin, Wei Qiang, et al.. Modeling and control of piezo-stage using neural networks[J]. Optics and Precision Engineering, 2013, 20(3): 587-594.

[13] [13] Wang Cong, Du Li, Zhang Junwei, et al.. Advancing precision of grating tiling with modified single neuron adaptive PID control algorithm[J]. Chinese J Lasers, 2012, 39(5): 0502014.

[14] [14] Li Hongzhuang, Zhang Zhenduo, Wang Jianli, et al.. Active surface-profile correction of 620 mm thin-mirror based on flotation support[J]. Acta Optica Sinica, 2013, 33(5): 0511001.