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Chinese Journal of Lasers, Volume. 41, Issue 6, 608001(2014)

300 mm-Travel Stage of Grating Ruling Engine and Its Self-Adaptive Control Method

Li Xiaotian*, Yu Haili, Qi Xiangdong, Zhu Jiwei, Yu Hongzhu, and Bayanheshig
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    Article index updated: Mar. 10, 2025

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    Li Xiaotian, Yu Haili, Qi Xiangdong, Zhu Jiwei, Yu Hongzhu, Bayanheshig. 300 mm-Travel Stage of Grating Ruling Engine and Its Self-Adaptive Control Method[J]. Chinese Journal of Lasers, 2014, 41(6): 608001

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    Paper Information

    Category: Measurement and metrology

    Received: Oct. 10, 2013

    Accepted: --

    Published Online: Apr. 9, 2014

    The Author Email: Xiaotian Li (lixt_1981@163.com)

    DOI:10.3788/cjl201441.0608001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology