[1] [1] WIESNER R.Filter media:Johns Manville-filtration in defiance [J].Filtration ＆ Separation,2008,45(1):36-37.

[2] [2] GOUKLER B R.Metal stencil overview [J].SMTSurface Mount Technology Magazine,2001,15(4):84-87.

[3] [3] GOLDBERG H D,BROWN R,LIU D P,et al..Screen printing:a technology for the batch fabrication of integrated chemical-sensor arrays [J].Sensots and Actuators,1994,21(3):171-183.

[4] [4] BACHER W,MENZ W,MOHR J.The LIGAtechnique and its potential for microsystems-a survey[J].IEEE Transactions On Industrial Electronics, 1995,42(5):431-441.

[5] [5] TOLFREE D.Commercializing HARMST-LIGA technologies [J].Microsystems Technology,2008,14(9-11):1487-1489.

[6] [6] QU W N,WENZEL C,JAHN A,et a1..UV-LI-GA:a promising and low-cost variant for microsystem technology [C].Conference on Optoelectronic ＆ Microelectronic Materials and Devices.Proceedings,COMMAD,1999:380-383.

[7] [7] MING P M,ZHU D,HU Y Y,et al..Fabricationof nickel soft contact microprobe based on UV-LI-GA [J].Optics and Precision Engineering,2007,15(5):735-740.(in Chinese)

[8] [8] YOU X Z,YOU X Y,BAI Y.Specification and quality indicators of nickel screen [J].Dyeing andFinishing,2006(17):26-28.(In Chinese)

[9] [9] MING P M,ZHU D,HU Y Y,et al..Novel microelectroforming technique with assisting low airpressure alternately and temperature-gradient [J].Binggong Xuebao,2008,29(6):746-751.(in Chinese)