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Optics and Precision Engineering, Volume. 17, Issue 6, 1267(2009)

Fabrication of metal micro-precision sieves with high open areas using UV-LIGA process

MING Ping-mei1,2、*, ZHU Di1, ZHOU Feng1, HU Yang-yang1, and ZENG Yong-bin1
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    MING Ping-mei, ZHU Di, ZHOU Feng, HU Yang-yang, ZENG Yong-bin. Fabrication of metal micro-precision sieves with high open areas using UV-LIGA process[J]. Optics and Precision Engineering, 2009, 17(6): 1267

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    Paper Information

    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Aug. 28, 2009

    The Author Email: MING Ping-mei (ming-pm@unaa.edu.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology