Fig. 1. Schematics of pupil shaping based on MMA. (a) Two illumination source shapes generated by MMA; (b) MMA for pupil shaping device; (c) structure of designed micromirror

Fig. 2. Schematics of electrostatically actuated micromirror with single serprntine beam. (a) Micromirror structure; (b) tilt of micromirror

Fig. 3. Schematic of rectangular micromirror

Fig. 4. Structure of designed micromirror. (a) Electrode; (b) serpentine beam

Fig. 5. Voltage-displacement curves actuated by initial electrode structure

Fig. 6. Vibrational modes of micromirror. (a) Torsion motion around x axis; (b) mirror translation; (c) torsion motion around y axis

Fig. 7. Schematic of optimized stepped electrodes

Fig. 8. Voltage-displacement curves under flat electrode and stepped electrode actuation

Fig. 9. Stress distributions in torsion micromirror under Con. 3 condition. (a) Stress distribution in micromirror with flat electrodes; (b) stress distribution in micromirror with stepped electrodes; (c) stress distribution of serpentine beam in micromirror with flat electrodes; (d) stress distribution of serpentine beam in micromirror with stepped electrodes