Research on Photomask Defects Path Optimization Based on Ant Colony Algorithm Mixed with 2⁃opt


	总行程/mm	优化率/(%)	耗时/s	总行程/mm	优化率/(%)	耗时/s	总行程/mm	优化率/(%)	耗时/s
AOI排序	18 904	0	/	39 282	0	/	53 837	0	/
X升序	17 656	6.6	/	14 203	63.8	/	36 647	31.9	/
Y升序	11 641	38.4	/	32 547	17.1	/	29 044	46.1	/
Basic ACO	6 748	64.3	270	5 027	87.2	656	7 659	85.8	2 044
2⁃opt+ACO_DFT	5 246	72.3	19	5 009	87.3	92	7 160	86.7	194

Table 2. Parameter settings of four ACO algorithms mixed with 2⁃opt
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Table 2. Parameter settings of four ACO algorithms mixed with 2⁃opt
$α$ 、 $β$ 、 $ρ$ 蚂蚁数 $m$ 循环数 $c$ $n_{a}$ $n_{b}$
2⁃opt+ACO_DFT $α = 1 、 β = 2$ 、 $ρ$ =0.6 取坐标数 $n$ 100 / /
2⁃opt+ACO_less ant 10 100 / /
2⁃opt+ACO_acc_1 10 100 20 20
2⁃opt+ACO_acc_2 20 200 20 20

Table 3. Optimization results comparison of four ACO algorithms mixed with 2⁃opt

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Table 3. Optimization results comparison of four ACO algorithms mixed with 2⁃opt

	pr299				fl417
	最优解	耗时/s	结果	误差/(%)	最优解	耗时/s	结果	误差/(%)
2⁃opt+ACO_DFT	48 191	1293	49 250	2.2	11 861	4 909	12 052	1.61
2⁃opt+ACO_less ant		44	49 129	1.95		112	12 034	1.46
2⁃opt+ACO_acc_1		4.28	49 030	1.74		8.32	12 032	1.44
2⁃opt+ACO_acc_2		14.96	48 904	1.48		28.26	12 018	1.32

Table 4. Optimized paths of 2⁃opt+ACO_DFT and 2⁃opt+ACO_less ant

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Table 4. Optimized paths of 2⁃opt+ACO_DFT and 2⁃opt+ACO_less ant

		2⁃opt+ACO_DFT			2⁃opt+ACO_less ant
序号	耗时/s	行程/mm	失焦率/(%)	优化率/(%)	耗时/s	行程/mm	失焦率/(%)	优化率/(%)
1	1 923	7 954.03	0.31	92.41	52	7 839.32	0.31	92.52
2	1 740	7 768.36	0.62	92.59	53	7 882.88	0.62	92.48
3	1 747	7 806.21	0.31	92.55	52	7 819.07	0.31	92.54
4	1 718	7 846.97	0.62	92.51	53	7 832.07	0.62	92.53
5	1 719	7 708.77	0.31	92.64	53	7 850.98	0.62	92.51
6	1 818	7 847.72	0.31	92.51	53	7 951.2	0.62	92.41
7	1 735	7 802.49	0.31	92.56	52	7 860.31	0.31	92.50
8	1 686	7 779.74	0.31	92.58	53	7 855.55	0.31	92.50
9	1 663	7 850	0.31	92.51	52	7 902.88	0.31	92.46
10	1 718	7 800.7	0.31	92.56	52	7 767.46	0.31	92.59
Ave	1 746.7	7 816.5	0.37	92.54	52.5	7 856.17	0.43	92.50

Table 5. Optimized paths of 2⁃opt+ACO_acc_1 and 2⁃opt+ACO_acc_2

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Table 5. Optimized paths of 2⁃opt+ACO_acc_1 and 2⁃opt+ACO_acc_2

		2⁃opt+ACO_acc_1			2⁃opt+ACO_acc_2
序号	耗时/s	行程/mm	失焦率/(%)	优化率/(%)	耗时/s	行程/mm	失焦率/(%)	优化率/(%)
1	5.59	7 792.38	0.62	92.57	19.22	7 806.15	0.31	92.55
2	5.63	7 801.62	0.31	92.56	19.36	7 738.88	0.62	92.62
3	5.47	7 805.7	0.31	92.55	19.22	7 802.37	0.00	92.56
4	5.66	7 830.86	0.00	92.53	19.23	7 739.23	0.00	92.62
5	5.54	7 823.87	0.00	92.5	19.09	7 786.99	0.31	92.57
6	5.53	7 845.53	0.31	92.51	19.1	7 700.44	0.62	92.65
7	5.64	7 768.19	0.31	92.59	19.29	7 792.98	0.31	92.56
8	5.53	7 836.91	0.31	92.52	19.26	7 813.04	0.31	92.55
9	5.54	7 756.25	0.31	92.60	19.57	7 802.21	0.31	92.56
10	5.59	7 779.59	0.31	92.58	19.7	7 812.41	0.31	92.55
Ave	5.57	7 804.09	0.28	92.55	19.3	7 779.47	0.31	92.58

Table 6. Application results of 2⁃opt+ACO_acc algorithm applied in practical production

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Table 6. Application results of 2⁃opt+ACO_acc algorithm applied in practical production

订单号	蚂蚁数 $m$ &循环数 $c$	路径长度/mm		镜头寻点时长/min		节省时长/min
订单号	蚂蚁数 $m$ &循环数 $c$	优化前	优化后	优化前	优化后	节省时长/min
A1960798	$m$ =10& $c$ =100	9 118	5 377	11.3	3.1	8.2
A1960799		16 850	5 521	17.5	5.1	12.4
A1964778		29 518	4 399	29.8	8.9	20.9
A1964136		45 080	7 762	40.0	12.2	27.8
A1964115	$m$ =20& $c$ =200	66 310	7 780	75.9	19.8	56.1
A1964407		77 333	15 088	83.7	24.3	59.4
A1973844		111 524	11 966	102.7	26.7	76
A1972959	$m$ =25& $c$ =250	134 565	12 772	173.3	67.8	105.5

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Zhijun XU, Yateng WANG, Qilong XIONG. Research on Photomask Defects Path Optimization Based on Ant Colony Algorithm Mixed with 2⁃opt[J]. Optoelectronic Technology, 2021, 41(4): 274

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Paper Information

Category: Research and Trial-manufacture

Received: May. 12, 2021

Accepted: --

Published Online: Aug. 3, 2022

The Author Email:

DOI:10.19453/j.cnki.1005-488x.2021.04.006

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Optimization comparison among AOI order， X/Y ascending order， basic ACO and 2⁃opt+ACO_DFT

Table 1. Optimization comparison among AOI order， X/Y ascending order， basic ACO and 2⁃opt+ACO_DFT

Table 2. Parameter settings of four ACO algorithms mixed with 2⁃opt

Table 2. Parameter settings of four ACO algorithms mixed with 2⁃opt

Table 3. Optimization results comparison of four ACO algorithms mixed with 2⁃opt

Table 3. Optimization results comparison of four ACO algorithms mixed with 2⁃opt

Table 4. Optimized paths of 2⁃opt+ACO_DFT and 2⁃opt+ACO_less ant

Table 4. Optimized paths of 2⁃opt+ACO_DFT and 2⁃opt+ACO_less ant

Table 5. Optimized paths of 2⁃opt+ACO_acc_1 and 2⁃opt+ACO_acc_2

Table 5. Optimized paths of 2⁃opt+ACO_acc_1 and 2⁃opt+ACO_acc_2

Table 6. Application results of 2⁃opt+ACO_acc algorithm applied in practical production

Table 6. Application results of 2⁃opt+ACO_acc algorithm applied in practical production