Acta Optica Sinica, Volume. 40, Issue 7, 0722001(2020)
Tolerance Analysis of Micromirror Array in Deep Ultraviolet Lithography Illumination System
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Chao Yin, Yanqiu Li, Xu Yan, Ke Liu, Lihui Liu. Tolerance Analysis of Micromirror Array in Deep Ultraviolet Lithography Illumination System[J]. Acta Optica Sinica, 2020, 40(7): 0722001
Category: Optical Design and Fabrication
Received: Oct. 8, 2019
Accepted: Dec. 26, 2019
Published Online: Apr. 15, 2020
The Author Email: Yanqiu Li (liyanqiu@bit.edu.cn)