Acta Optica Sinica, Volume. 32, Issue 4, 430002(2012)

Extreme Ultraviolet and Visible Emission Spectroscopic Characterization of CO2 Laser Produced Tin Plasma for Lithography

Wu Tao1,2、*, Wang Xinbing1, Tang Jian1, Wang Shaoyi1, Rao Zhiming1, Yang Chenguang1, and Lu Hong1
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  • 1[in Chinese]
  • 2[in Chinese]
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    CLP Journals

    [1] Wu Tao, Wang Xinbing, Wang Shifang, Tan Rong. Research on Pulsed CO2 Laser Produced Sn Plasma Plume Expansion Properties by Shadowgraph Technique[J]. Chinese Journal of Lasers, 2013, 40(1): 102003

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    Wu Tao, Wang Xinbing, Tang Jian, Wang Shaoyi, Rao Zhiming, Yang Chenguang, Lu Hong. Extreme Ultraviolet and Visible Emission Spectroscopic Characterization of CO2 Laser Produced Tin Plasma for Lithography[J]. Acta Optica Sinica, 2012, 32(4): 430002

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    Paper Information

    Category: Spectroscopy

    Received: Sep. 29, 2011

    Accepted: --

    Published Online: Feb. 24, 2012

    The Author Email: Tao Wu (wtlaser@126.com)

    DOI:10.3788/aos201232.0430002

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