Acta Optica Sinica, Volume. 32, Issue 4, 430002(2012)
Extreme Ultraviolet and Visible Emission Spectroscopic Characterization of CO2 Laser Produced Tin Plasma for Lithography
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Wu Tao, Wang Xinbing, Tang Jian, Wang Shaoyi, Rao Zhiming, Yang Chenguang, Lu Hong. Extreme Ultraviolet and Visible Emission Spectroscopic Characterization of CO2 Laser Produced Tin Plasma for Lithography[J]. Acta Optica Sinica, 2012, 32(4): 430002
Paper Information
Category: Spectroscopy
Received: Sep. 29, 2011
Accepted: --
Published Online: Feb. 24, 2012
The Author Email: Tao Wu (wtlaser@126.com)
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