Fig. 1.

Fig. 2. The reflection spectrum of the intermediate dielectric layer with equivalent refractive index n=1

Fig. 3. (a) Electric field distribution; (b) Magnetic field distribution; (c) Surface current distribution of the three-dimensional metamaterial resonant structure

Fig. 4. Effect of the tooth alignment depth of the double-layer stereo resonant structure on the resonant reflection spectra

Fig. 5. (a) Reflectance spectra of the dual-layer 3D structure for refractive index sensing,and (b) the fitting line

Fig. 6. Reflectance spectra of the dual-layer 3D structure for (a) the z-axis micro-displacement sensing and (b) its fitted sensitivity. (c) Reflectance spectra of the y-axis micro-displacement sensing and (d) its fitted sensitivity