Acta Optica Sinica, Volume. 37, Issue 10, 1031001(2017)

Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering

Huasong Liu1,2,3, Xiao Yang1, Dandan Liu1, Chenghui Jiang1, Shida Li1, Yiqin Ji1,2,3、*, Feng Zhang1, Lishuan Wang1,2, Yugang Jiang1, and Deying Chen2
Author Affiliations
  • 1 Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics, Aerodynamic Technology Academy of China Aerospace Science and Industry Corp., Tianjin 300308, China
  • 2 National Key Laboratory of Science and Technology on Tunable Laser, Institute of Opto-Electronics, Harbin Institute of Technology, Harbin, Heilongjiang 150080, China
  • 3 Shenzhen Aerospace Industry Technology Research Institute, China Aerospace Science and Industry Corp., Shenzhen, Guangdong 518048, China
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    References(17)

    [1] Arndt D P. Azzam R M A, Bennett J M, et al. Multiple determination of the optical constants of thin-film coating materials[J]. Applied Optics., 23, 3571-3596(1984).

    [12] Zhou Yi, Wu Guosong, Dai Wei et al. Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach[J]. Acta Physica Sinica, 59, 2356-2363(2010).

    [14] Liu Huasong, Ji Yiqin, Zhang Feng et al. Dispersive properties of optical constants of some metallic oxide thin films in the mid-infrared regions[J]. Acta Optica Sinica, 34, 0831003(2014).

    [16] Ristau D, Gross T. Ion beam sputter coatings for laser technology[C]. SPIE, 5963, 596313(2005).

    [18] Dligatch S, Gross M, Chtanov A. Ultra-low-reflectance, high-uniformity, multilayer-antireflection coatings on large substrates deposited using an ion-beam sputtering system with a customized planetary rotation stage[C]. SPIE, 8168, 816803(2011).

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    Huasong Liu, Xiao Yang, Dandan Liu, Chenghui Jiang, Shida Li, Yiqin Ji, Feng Zhang, Lishuan Wang, Yugang Jiang, Deying Chen. Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering[J]. Acta Optica Sinica, 2017, 37(10): 1031001

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    Paper Information

    Category: Thin Films

    Received: Apr. 7, 2017

    Accepted: --

    Published Online: Sep. 7, 2018

    The Author Email: Yiqin Ji (ji_yiqin@yahoo.com)

    DOI:10.3788/AOS201737.1031001

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