Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering

Huasong Liu; Xiao Yang; Dandan Liu; Chenghui Jiang; Shida Li; Yiqin Ji; Feng Zhang; Lishuan Wang; Yugang Jiang; Deying Chen

doi:10.3788/AOS201737.1031001

Acta Optica Sinica, Volume. 37, Issue 10, 1031001(2017)

Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering

Huasong Liu^1,2,3, Xiao Yang¹, Dandan Liu¹, Chenghui Jiang¹, Shida Li¹, Yiqin Ji^1,2,3、*, Feng Zhang¹, Lishuan Wang^1,2, Yugang Jiang¹, and Deying Chen²

Author Affiliations

¹ Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics, Aerodynamic Technology Academy of China Aerospace Science and Industry Corp., Tianjin 300308, China

² National Key Laboratory of Science and Technology on Tunable Laser, Institute of Opto-Electronics, Harbin Institute of Technology, Harbin, Heilongjiang 150080, China

³ Shenzhen Aerospace Industry Technology Research Institute, China Aerospace Science and Industry Corp., Shenzhen, Guangdong 518048, China

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Huasong Liu, Xiao Yang, Dandan Liu, Chenghui Jiang, Shida Li, Yiqin Ji, Feng Zhang, Lishuan Wang, Yugang Jiang, Deying Chen. Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering[J]. Acta Optica Sinica, 2017, 37(10): 1031001

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Paper Information

Category: Thin Films

Received: Apr. 7, 2017

Accepted: --

Published Online: Sep. 7, 2018

The Author Email: Yiqin Ji (ji_yiqin@yahoo.com)

DOI:10.3788/AOS201737.1031001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology