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Acta Optica Sinica, Volume. 35, Issue 10, 1011003(2015)

Compensation Method of Thermal Aberration for On-Axis Two-Mirror High NA lithographic Lens

Xu Xiangru1,2、*, Huang Wei1, Jia Shuqiang1, and Xu Mingfei1,2
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    Xu Xiangru, Huang Wei, Jia Shuqiang, Xu Mingfei. Compensation Method of Thermal Aberration for On-Axis Two-Mirror High NA lithographic Lens[J]. Acta Optica Sinica, 2015, 35(10): 1011003

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    Paper Information

    Category: Reviews

    Received: Apr. 20, 2015

    Accepted: --

    Published Online: Oct. 8, 2015

    The Author Email: Xiangru Xu (xuxiangru@foxmail.com)

    DOI:10.3788/aos201535.1011003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology