Journal of Optoelectronics · Laser, Volume. 35, Issue 8, 822(2024)

Ellipsometric analysis of TiO2 thin films based on different dispersion models

WANG Mengru1, GUAN Yue1, YANG Junying1, SUN Xiaojuan2, and HAN Peigao1、*
Author Affiliations
  • 1School of Physics and Physical Engineering, Qufu Normal University, Qufu, Shandong 273165, China
  • 2School of Geosciences, China University of Petroleum, Qingdao, Shandong 266580, China
  • show less
    References(14)

    [1] [1] ZHU W, CHAI W, CHEN D, et al. Recycling of FTO/TiO2 substrates: route toward simultaneously high-performance and cost-efficient carbon-based, all-inorganic CsPbIBr2 solar cells[J]. ACS Applied Materials & Interfaces, 2020, 12(4): 4549-4557.

    [2] [2] HUANG H, CUI P, CHEN Y, et al. 24.8%-efficient planar perovskite solar cells via ligand-engineered TiO2 deposition[J]. Joule, 2022, 6(9): 2186-2202.

    [4] [4] CHANDA A, JOSHI S R, AKSHAY V R, et al. Structural and optical properties of multilayered un-doped and cobalt doped TiO2 thin films[J]. Applied Surface Science, 2020, 536:147830.

    [5] [5] QAID S M H, HUSSAIN M, HEZAM M, et al. Structural and optical investigation of brookite TiO2 thin films grown by atomic layer deposition on Si (111) substrates[J]. Materials Chemistry and Physics, 2019, 225:55-59.

    [6] [6] NIZIOL J, GONDEK E, KARASINSKI P. Effect of temperature changes on parameters of the sol-gel derived silica-titania films[J]. Materials Letters, 2018, 223: 102-104.

    [7] [7] RASHEED M, BARILLE R. Optical constants of DC sputtering derived ITO, TiO2 and TiO2∶Nb thin films characterized by spectrophotometry and spectroscopic ellipsometry for optoelectronic devices[J]. Journal of Non-Crystalline Solids, 2017, 476: 1-14.

    [8] [8] LI D, ZHANG W, GOULLET A. Influence of PECVD-TiO2 film morphology and topography on the spectroscopic ellipsometry data fitting process[J]. Modern Physics Letters B, 2020, 34(22): 2050228.

    [9] [9] RAVISY W, RICHARD-PLOUET M, DEY B, et al. Unveiling a critical thickness in photocatalytic TiO2 thin films grown by plasma-enhanced chemical vapor deposition using real time in situ spectroscopic ellipsometry[J]. Journal of Physics D∶Applied Physics, 2021, 54(44): 445303.

    [10] [10] ZHANG F, ZHANG R J, ZHANG D X, et al. Temperature-dependent optical properties of titanium oxide thin films studied by spectroscopic ellipsometry[J]. Applied Physics Express, 2013, 6(12): 121101.

    [11] [11] SHI Y J, ZHANG R J, ZHENG H, et al. Optical constants and band gap evolution with phase transition in sub-20 nm-thick TiO2 films prepared by ALD[J]. Nanoscale Research Letters, 2017, 12(1): 243.

    [13] [13] FUJIWARA H. Spectroscopic ellipsometry: principles and applications[M]. Hoboken: John Wiley & Sons, 2007: 87-360.

    [14] [14] ALI R, SALEEM M R, HONKANEN S. Temperature induced changes in optical properties of thin film TiO2-Al2O3 bi-layer structures grown by atomic layer deposition[J]. Proceedings of SPIE, 2016, 9749: 97490O.

    [15] [15] XIE H, NG F L, ZENG X T. Spectroscopic ellipsometry study of thin film thermo-optical properties[J]. Thin Solid Films, 2009, 517(17): 5066-5069.

    [17] [17] NACEUR J B, GAIDI M, BOUSBIH F, et al. Annealing effects on microstructural and optical properties of nanostructured-TiO2 thin films prepared by sol-gel technique[J]. Current Applied Physics, 2012, 12(2): 422-428.

    Tools

    Get Citation

    Copy Citation Text

    WANG Mengru, GUAN Yue, YANG Junying, SUN Xiaojuan, HAN Peigao. Ellipsometric analysis of TiO2 thin films based on different dispersion models[J]. Journal of Optoelectronics · Laser, 2024, 35(8): 822

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Dec. 2, 2022

    Accepted: Dec. 13, 2024

    Published Online: Dec. 13, 2024

    The Author Email: HAN Peigao (pghan@foxmail.com)

    DOI:10.16136/j.joel.2024.08.0822

    Topics