Journal of Optoelectronics · Laser, Volume. 35, Issue 8, 822(2024)

Ellipsometric analysis of TiO2 thin films based on different dispersion models

WANG Mengru1, GUAN Yue1, YANG Junying1, SUN Xiaojuan2, and HAN Peigao1、*
Author Affiliations
  • 1School of Physics and Physical Engineering, Qufu Normal University, Qufu, Shandong 273165, China
  • 2School of Geosciences, China University of Petroleum, Qingdao, Shandong 266580, China
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    In order to study the effects of different dispersion models on the ellipsometry spectra analysis of TiO2 films containing pores, TiO2 thin films are prepared by sol-gel method, and five dispersion models are used to fit the ellipsometry spectra of TiO2 films in the wavelength range of 1.55—4 eV. The fitting results of each model are verified by the oblique reflection spectra. The results show that the selection of different dispersion models has an effect on the fitting results of film thickness and porosity, and the fitting results of refractive index dispersion are obviously affected by the dispersion model. New-Amorphous, Tauc-Lorentz and Adachi-New Forouhi models are suitable for the ellipsometry spectra fitting of sol-gel TiO2 film on the whole test band. However, the Cauchy Absorbent and Sellmeier Absorbent models cannot get a good ellipsometric spectral fitting for the whole test band, and the applicable band is narrow. The results provide a reference for the ellipsometry spectra analysis of sol-gel TiO2 thin films containing pores.

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    WANG Mengru, GUAN Yue, YANG Junying, SUN Xiaojuan, HAN Peigao. Ellipsometric analysis of TiO2 thin films based on different dispersion models[J]. Journal of Optoelectronics · Laser, 2024, 35(8): 822

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    Paper Information

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    Received: Dec. 2, 2022

    Accepted: Dec. 13, 2024

    Published Online: Dec. 13, 2024

    The Author Email: HAN Peigao (pghan@foxmail.com)

    DOI:10.16136/j.joel.2024.08.0822

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