Journal of Inorganic Materials, Volume. 40, Issue 2, 128(2025)
With upgrading of communication technology and driving of 5G communication applications, the explosive number of filters required by various smart devices promoted prosperity of the filter market. However, the demanded performance also becomes increasingly stringent, including broad bandwidth, high frequency, high power capacity, miniaturization, integration, and low cost, in both academia and industry. To meet these strict requirements, the thin film bulk acoustic resonator (FBAR) filters have emerged as one of the most promising types of filters with commercial success. But currently they are still facing difficulties such as insufficient performance, complex fabrication process, relatively higher cost, and technological constraints. This paper reviews the relevant issues and key technologies in FBAR filters in three aspects: theoretical research on devices and structural optimization, preparation and optimization of high-performance piezoelectric materials, and development of novel processes and technological integration. The purpose of this paper is to delineate the trajectory of technological advancements and iterations in FBAR filters for scholars in the research field, with the expectation of providing several considerations for future research directions and pathways.
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Guilong TAO, Guowei ZHI, Tianyou LUO, Peidong OUYANG, Xinyan YI, Guoqiang LI.
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Received: Jul. 27, 2024
Accepted: --
Published Online: Apr. 24, 2025
The Author Email: Guoqiang LI (msgli@scut.edu.cn)