Researching | Performance Index Analysis of the Support of Lithographic Lens with Multi Flexural Brackets

Opto-Electronic Engineering, Volume. 40, Issue 2, 71(2013)

Performance Index Analysis of the Support of Lithographic Lens with Multi Flexural Brackets

PENG Haifeng^*, GONG Yan, and ZHAO Lei

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[in Chinese]

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PENG Haifeng, GONG Yan, ZHAO Lei. Performance Index Analysis of the Support of Lithographic Lens with Multi Flexural Brackets[J]. Opto-Electronic Engineering, 2013, 40(2): 71

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Received: Nov. 13, 2012

Accepted: --

Published Online: Mar. 5, 2013

The Author Email: Haifeng PENG (kedapeng1986@163.com)

DOI:10.3969/j.issn.1003-501x.2013.02.011

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology