Opto-Electronic Engineering, Volume. 40, Issue 2, 71(2013)
Performance Index Analysis of the Support of Lithographic Lens with Multi Flexural Brackets
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PENG Haifeng, GONG Yan, ZHAO Lei. Performance Index Analysis of the Support of Lithographic Lens with Multi Flexural Brackets[J]. Opto-Electronic Engineering, 2013, 40(2): 71
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Received: Nov. 13, 2012
Accepted: --
Published Online: Mar. 5, 2013
The Author Email: Haifeng PENG (kedapeng1986@163.com)
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