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Acta Optica Sinica, Volume. 40, Issue 10, 1031002(2020)

Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers

Shizhuang Sun1,2, Chunshui Jin1、*, Bo Yu1、**, Tao Guo1, Shun Yao1, Chun Li1, and Wenyuan Deng1
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated: Mar. 10, 2025

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    Shizhuang Sun, Chunshui Jin, Bo Yu, Tao Guo, Shun Yao, Chun Li, Wenyuan Deng. Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers[J]. Acta Optica Sinica, 2020, 40(10): 1031002

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    Paper Information

    Category: Thin Films

    Received: Nov. 25, 2019

    Accepted: Feb. 26, 2020

    Published Online: Apr. 28, 2020

    The Author Email: Jin Chunshui (jincs@sklao.ac.cn), Yu Bo (yubodisan@126.com)

    DOI:10.3788/AOS202040.1031002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology