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Laser & Optoelectronics Progress, Volume. 60, Issue 7, 0716001(2023)

Simulation Study on Behavior Characteristics of Ion-Beam Sputtering to Fused Silica, Silicon, Gold, and Copper Using Monte Carlo Method

Bangjie Hu1, Qinghua Zhang2, Mincai Liu2, Qiao Xu2, and Yaguo Li1、*
Author Affiliations
  • 1Fine Optical Engineering Research Center, Chengdu 610041, Sichuan, China
  • 2Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan, China
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    Article index updated: Sep. 7, 2025

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    Bangjie Hu, Qinghua Zhang, Mincai Liu, Qiao Xu, Yaguo Li. Simulation Study on Behavior Characteristics of Ion-Beam Sputtering to Fused Silica, Silicon, Gold, and Copper Using Monte Carlo Method[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0716001

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    Paper Information

    Category: Materials

    Received: Nov. 4, 2021

    Accepted: Feb. 18, 2022

    Published Online: Mar. 31, 2023

    The Author Email: Yaguo Li (yargolee@163.com)

    DOI:10.3788/LOP212871

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology