Preparation of X-Ray Fresnel Zone Plate by Atomic Layer Deposition and Focused Ion Beam Slicing

Mingsheng Tan; Shuaiqiang Ming; Yufei Wu; Weier Lu; Yanli Li; Xiangdong Kong; Haigang Liu; Yang Xia; Li Han

doi:10.3788/AOS222052

Acta Optica Sinica, Volume. 43, Issue 11, 1134001(2023)

Preparation of X-Ray Fresnel Zone Plate by Atomic Layer Deposition and Focused Ion Beam Slicing

Mingsheng Tan^1,3, Shuaiqiang Ming¹, Yufei Wu^1,3, Weier Lu^1,3、*, Yanli Li^2、**, Xiangdong Kong^2,3、***, Haigang Liu⁴, Yang Xia^1,3, and Li Han^2,3

Author Affiliations

¹Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

²Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China

³University of Chinese Academy of Sciences, Beijing 100049, China

⁴Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201800, China

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Mingsheng Tan, Shuaiqiang Ming, Yufei Wu, Weier Lu, Yanli Li, Xiangdong Kong, Haigang Liu, Yang Xia, Li Han. Preparation of X-Ray Fresnel Zone Plate by Atomic Layer Deposition and Focused Ion Beam Slicing[J]. Acta Optica Sinica, 2023, 43(11): 1134001

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Paper Information

Category: X-Ray Optics

Received: Nov. 25, 2022

Accepted: Feb. 21, 2023

Published Online: May. 29, 2023

The Author Email: Lu Weier (luweier@ime.ac.cn), Li Yanli (liyanli@mail.iee.ac.cn), Kong Xiangdong (slkongxd@mail.iee.ac.cn)

DOI:10.3788/AOS222052

Topics

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