Research on real-time optical flux monitoring technology in molecular beam epitaxy based on LED light source

ZHANG Qinglingyun; WANG Xiaozhen; LI Jianmei; CHEN Yiqiao

doi:10.20027/j.gncq.2025.0032

Journal of Functional Materials and Devices, Volume. 31, Issue 4, 302(2025)

Research on real-time optical flux monitoring technology in molecular beam epitaxy based on LED light source

ZHANG Qinglingyun^1,2, WANG Xiaozhen^1,2, LI Jianmei^1,2, and CHEN Yiqiao^1,3、*

¹State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Acken Optoelectronics Ltd., Suzhou 215211, China

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ZHANG Qinglingyun, WANG Xiaozhen, LI Jianmei, CHEN Yiqiao. Research on real-time optical flux monitoring technology in molecular beam epitaxy based on LED light source[J]. Journal of Functional Materials and Devices, 2025, 31(4): 302

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Paper Information

Received: May. 9, 2025

Accepted: Aug. 22, 2025

Published Online: Aug. 22, 2025

The Author Email: CHEN Yiqiao (yqchen@mail.sim.ac.cn)

DOI:10.20027/j.gncq.2025.0032

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology