Chinese Journal of Lasers, Volume. 47, Issue 10, 1004003(2020)

Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry

Wang Chen1,2, Zhou You1, Lu Qi1, Xu Tianzhu1, and Liu Shijie1、*
Author Affiliations
  • 1Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(12)
    Dynamic point diffraction interferometer based on PMA
    Schematic diagram of optical path matching
    Schematic diagram of the experiment
    Interferogram collected by experiment. (a) Single image; (b) four phase-shifting interferograms
    Measurement results of surface shape. (a) Point diffraction interferometer; (b) ZYGO spherical interferometer
    PV and RMS measured by 12 repeated experiments
    Vibration spectrum diagrams of the platform and the corresponding phase-shifting interferograms. (a) Without external vibration; (b) with external vibration
    RMS obtained by averaging different numbers of phase images
    Translation alignment error between focusing beam and pinhole
    Change curve of light intensity transmittance versus offset. (a) Offset in one direction; (b) offset in two directions
    Relationship between the contrast of the interferogram of the mirror under test and the light intensity ratio
    • Table 1. Parameters of pinhole diffraction simulation model

      View table

      Table 1. Parameters of pinhole diffraction simulation model

      Wavelengthλ /nmSpace stepΔl /nmSimulation area /μmPinholediameter /μmPinholethickness /nmNAAbsorbingboundary
      xyz
      63531.646.334.754.7523000.42PML
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    Wang Chen, Zhou You, Lu Qi, Xu Tianzhu, Liu Shijie. Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry[J]. Chinese Journal of Lasers, 2020, 47(10): 1004003

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    Paper Information

    Category: Measurement and metrology

    Received: Apr. 24, 2020

    Accepted: --

    Published Online: Oct. 16, 2020

    The Author Email: Shijie Liu (shijieliu@siom.ac.cn)

    DOI:10.3788/CJL202047.1004003

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