Chinese Journal of Lasers, Volume. 47, Issue 10, 1004003(2020)
Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry
Fig. 4. Interferogram collected by experiment. (a) Single image; (b) four phase-shifting interferograms
Fig. 5. Measurement results of surface shape. (a) Point diffraction interferometer; (b) ZYGO spherical interferometer
Fig. 7. Vibration spectrum diagrams of the platform and the corresponding phase-shifting interferograms. (a) Without external vibration; (b) with external vibration
Fig. 10. Change curve of light intensity transmittance versus offset. (a) Offset in one direction; (b) offset in two directions
Fig. 11. Relationship between the contrast of the interferogram of the mirror under test and the light intensity ratio
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Wang Chen, Zhou You, Lu Qi, Xu Tianzhu, Liu Shijie. Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry[J]. Chinese Journal of Lasers, 2020, 47(10): 1004003
Category: Measurement and metrology
Received: Apr. 24, 2020
Accepted: --
Published Online: Oct. 16, 2020
The Author Email: Shijie Liu (shijieliu@siom.ac.cn)