Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry

Wang Chen; Zhou You; Lu Qi; Xu Tianzhu; Liu Shijie

doi:10.3788/CJL202047.1004003

Chinese Journal of Lasers, Volume. 47, Issue 10, 1004003(2020)

Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry

Wang Chen^1,2, Zhou You¹, Lu Qi¹, Xu Tianzhu¹, and Liu Shijie^1、*

¹Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Wang Chen, Zhou You, Lu Qi, Xu Tianzhu, Liu Shijie. Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry[J]. Chinese Journal of Lasers, 2020, 47(10): 1004003

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Paper Information

Category: Measurement and metrology

Received: Apr. 24, 2020

Accepted: --

Published Online: Oct. 16, 2020

The Author Email: Shijie Liu (shijieliu@siom.ac.cn)

DOI:10.3788/CJL202047.1004003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology