Chinese Journal of Lasers, Volume. 45, Issue 4, 404002(2018)

Analysis on the Accuracy of Flat Sub-Aperture Stitching Interferometry

Lu Yunjun*, Tang Feng, Wang Xiangzhao, and Guo Fudong
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  • [in Chinese]
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    References(18)

    [2] Bray M. Stitching interferometer for large optics using a standard interferometer: description of an automated system[C]. SPIE, 3047, 911-918(1997).

    [4] King C W. An automated metrology workstation for the measurement of large convex surfaces[C]. Optical Fabrication and Testing, OTh3B, 2(2014).

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    [7] Wang Q, Chen J, Zhu R et al. New technique for testing large optical flat[C]. SPIE, 2003, 389-397(1993).

    [13] Lu Y, Tang F, Wang X et al. A high accuracy subaperture stitching system for nonflatness measurement of wafer stage mirror[C]. SPIE, 9276, 927617(2014).

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    Lu Yunjun, Tang Feng, Wang Xiangzhao, Guo Fudong. Analysis on the Accuracy of Flat Sub-Aperture Stitching Interferometry[J]. Chinese Journal of Lasers, 2018, 45(4): 404002

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    Paper Information

    Category: Measurement and metrology

    Received: Sep. 7, 2017

    Accepted: --

    Published Online: Apr. 13, 2018

    The Author Email: Yunjun Lu (luyj@siom.ac.cn)

    DOI:10.3788/CJL201845.0404002

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